E03200 - SEMI E32 - Material Movement Management (MMM) StdPbc-1017 • To establish performance criteria

• To establish performance criteria when purchasing ultrapure water (UPW) purification equipment

このスタンダードは，装置の操作に関連した情報セキュリティのためのガイドラインの作成に以下の項目に言及する。

This Guide provides UPW quality parameters and background information for the decision-making process related to new or retrofit facilities that manufacture semiconductors with line widths of 32 nm and smaller

2  This Specification is intended to ensure a high degree of device interoperability on the Sensor/Actuator Communication Network

本試験方法の目的は，ダイ剪断強度試験用の手順を決定することである。

E03200 - SEMI E32 - Material Movement Management (MMM) StdPbc-1017 • To establish performance criteriaThis Standard was technically approved by the Information & Control Global Technical Committee. Available at www. semi. org in September 1997; originally published in 1994. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. Automated material movement represents a